Effects of etchants in the transfer of chemical vapor deposited graphene

Date
2018
Journal Title
Journal ISSN
Volume Title
Publisher
AIP
Abstract

The quality of graphene can be strongly modified during the transfer process following chemical vapor deposition (CVD) growth. Here, we transferred CVD-grown graphene from a copper foil to a SiO2/Si substrate using wet etching with four different etchants: HNO3, FeCl3, (NH4)2S2O8, and a commercial copper etchant. We then compared the quality of graphene after the transfer process in terms of surface modifications, pollutions (residues and contaminations), and electrical properties (mobility and density). Our tests and analyses showed that the commercial copper etchant provides the best structural integrity, the least amount of residues, and the smallest doping carrier concentration.

Description
Advisor
Degree
Type
Journal article
Keywords
Citation

Wang, M., Yang, E.H., Vajtai, R., et al.. "Effects of etchants in the transfer of chemical vapor deposited graphene." Journal of Applied Physics, 123, (2018) AIP: https://doi.org/10.1063/1.5009253.

Has part(s)
Forms part of
Rights
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Link to license
Citable link to this page