Electrical performance of monolayer MoS2 field-effect transistors prepared by chemical vapor deposition

Abstract

Molybdenum disulfide (MoS2) field effect transistors (FET) were fabricated on atomically smooth large-area single layers grown by chemical vapor deposition. The layer qualities and physical properties were characterized using high-resolution Raman and photoluminescence spectroscopy, scanning electron microscopy, and atomic force microscopy. Electronic performance of the FET devices was measured using field effect mobility measurements as a function of temperature. The back-gated devices had mobilities of 6.0 cm2/V s at 300K without a high-j dielectric overcoat and increased to 16.1 cm2/V s with a high-j dielectric overcoat. In addition the devices show on/off ratios ranging from 105 to 109.

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Amani, Matin, Chin, Matthew L., Birdwell, A. Glen, et al.. "Electrical performance of monolayer MoS2 field-effect transistors prepared by chemical vapor deposition." Applied Physics Letters, 102, (2013) American Institute of Physics: 193107. http://dx.doi.org/10.1063/1.4804546.

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