High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate

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dc.citation.articleNumber205en_US
dc.citation.journalTitleMicrosystems & Nanoengineeringen_US
dc.citation.volumeNumber10en_US
dc.contributor.authorXia, Fanen_US
dc.contributor.authorPeng, Yandeen_US
dc.contributor.authorYue, Weien_US
dc.contributor.authorLuo, Mingzeen_US
dc.contributor.authorTeng, Meganen_US
dc.contributor.authorChen, Chun-Mingen_US
dc.contributor.authorPala, Sedaten_US
dc.contributor.authorYu, Xiaoyangen_US
dc.contributor.authorMa, Yuanzhengen_US
dc.contributor.authorAcharya, Meghaen_US
dc.contributor.authorArakawa, Ryuichien_US
dc.contributor.authorMartin, Lane W.en_US
dc.contributor.authorLin, Liweien_US
dc.contributor.orgRice Advanced Materials Instituteen_US
dc.date.accessioned2025-01-09T20:17:03Zen_US
dc.date.available2025-01-09T20:17:03Zen_US
dc.date.issued2024en_US
dc.description.abstractThis work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resonant frequency at 106.3 kHz under 4 Vp-p with outstanding characteristics: (1) a large vibration amplitude of 3.74 μm/V, and (2) a high acoustic root mean square (RMS) sound pressure level of 105.5 dB/V at 10 cm, which is 5–10 times higher than those of AlN-based pMUTs at a similar frequency. There are various potential sensing and actuating applications, such as fingerprint sensing, touch point, and gesture recognition. In this work, we present demonstrations in three fields: haptics, loudspeakers, and rangefinders. For haptics, an array of 15 × 15 KNN pMUTs is used as a non-contact actuator to provide a focal pressure of around 160.3 dB RMS SPL at a distance of 15 mm. This represents the highest output pressure achieved by an airborne pMUT for haptic sensation on human palms. When used as a loudspeaker, a single pMUT element with a resonant frequency close to the audible range at 22.8 kHz is characterized. It is shown to be able to generate a uniform acoustic output with an amplitude modulation scheme. In the rangefinder application, pulse-echo measurements using a single pMUT element demonstrate good transceiving results, capable of detecting objects up to 2.82 m away. As such, this new class of high-SPL and low-driving-voltage pMUTs could be further extended to other applications requiring high acoustic pressure and a small form factor.en_US
dc.identifier.citationXia, F., Peng, Y., Yue, W., Luo, M., Teng, M., Chen, C.-M., Pala, S., Yu, X., Ma, Y., Acharya, M., Arakawa, R., Martin, L. W., & Lin, L. (2024). High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate. Microsystems & Nanoengineering, 10(1), 1–13. https://doi.org/10.1038/s41378-024-00841-yen_US
dc.identifier.digitals41378-024-00841-yen_US
dc.identifier.doihttps://doi.org/10.1038/s41378-024-00841-yen_US
dc.identifier.urihttps://hdl.handle.net/1911/118141en_US
dc.language.isoengen_US
dc.publisherSpringer Natureen_US
dc.rightsExcept where otherwise noted, this work is licensed under a Creative Commons Attribution (CC BY) license. Permission to reuse, publish, or reproduce the work beyond the terms of the license or beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/en_US
dc.titleHigh sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobateen_US
dc.typeJournal articleen_US
dc.type.dcmiTexten_US
dc.type.publicationpublisher versionen_US
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