Phase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigue

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dc.citation.articleNumber2300877en_US
dc.citation.issueNumber9en_US
dc.citation.journalTitleAdvanced Electronic Materialsen_US
dc.citation.volumeNumber10en_US
dc.contributor.authorZhang, Zimengen_US
dc.contributor.authorCraig, Isaacen_US
dc.contributor.authorZhou, Taoen_US
dc.contributor.authorHolt, Martinen_US
dc.contributor.authorFlores, Raulen_US
dc.contributor.authorSheridan, Evanen_US
dc.contributor.authorInzani, Katherineen_US
dc.contributor.authorHuang, Xiaoxien_US
dc.contributor.authorNag, Joyeetaen_US
dc.contributor.authorPrasad, Bhagwatien_US
dc.contributor.authorGriffin, Sinéad M.en_US
dc.contributor.authorRamesh, Ramamoorthyen_US
dc.date.accessioned2024-11-20T15:52:02Zen_US
dc.date.available2024-11-20T15:52:02Zen_US
dc.date.issued2024en_US
dc.description.abstractAs a promising candidate for nonvolatile memory devices, the hafnia-based ferroelectric system has recently been a hot research topic. Although significant progress has been made over the past decade, the endurance problem is still an obstacle to its final application. In perovskite-based ferroelectrics, such as the well-studied Pb[ZrxTi1−x]O3 (PZT) family, polarization fatigue has been discussed within the framework of the interaction of charged defects (such as oxygen vacancies) with the moving domains during the switching process, particularly at the electrode-ferroelectric interface. Armed with this background, a hypothesis is set out to test that a similar mechanism can be in play with the hafnia-based ferroelectrics. The conducting perovskite La-Sr-Mn-O is used as the contact electrode to create La0.67Sr0.33MnO3 / Hf0.5Zr0.5O2 (HZO)/ La0.67Sr0.33MnO3 capacitor structures deposited on SrTiO3-Si substrates. Nanoscale X-ray diffraction is performed on single capacitors, and a structural phase transition from polar o-phase toward non-polar m-phase is demonstrated during the bipolar switching process. The energy landscape of multiphase HZO has been calculated at varying oxygen vacancy concentrations. Based on both theoretical and experimental results, it is found that a polar to non-polar phase transformation caused by oxygen vacancy redistribution during electric cycling is a likely explanation for fatigue in HZO.en_US
dc.identifier.citationZhang, Z., Craig, I., Zhou, T., Holt, M., Flores, R., Sheridan, E., Inzani, K., Huang, X., Nag, J., Prasad, B., Griffin, S. M., & Ramesh, R. (2024). Phase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigue. Advanced Electronic Materials, 10(9), 2300877. https://doi.org/10.1002/aelm.202300877en_US
dc.identifier.digitalPhase-Transformationen_US
dc.identifier.doihttps://doi.org/10.1002/aelm.202300877en_US
dc.identifier.urihttps://hdl.handle.net/1911/118049en_US
dc.language.isoengen_US
dc.publisherWileyen_US
dc.rightsExcept where otherwise noted, this work is licensed under a Creative Commons Attribution (CC BY) license. Permission to reuse, publish, or reproduce the work beyond the terms of the license or beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/en_US
dc.subject.keywordfatigueen_US
dc.subject.keywordferroelectricen_US
dc.subject.keywordfield-cyclingen_US
dc.subject.keywordhafniaen_US
dc.subject.keywordphase transformationen_US
dc.titlePhase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigueen_US
dc.typeJournal articleen_US
dc.type.dcmiTexten_US
dc.type.publicationpublisher versionen_US
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