Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

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dc.citation.firstpage50en_US
dc.citation.issueNumber1en_US
dc.citation.journalTitleJournal of Mechanical Engineeringen_US
dc.citation.lastpage55en_US
dc.citation.volumeNumber59en_US
dc.contributor.authorDick, Andrew J.en_US
dc.contributor.orgNonlinear Phenomena Laboratoryen_US
dc.date.accessioned2013-03-19T17:33:34Zen_US
dc.date.available2014-03-20T05:10:04Zen_US
dc.date.issued2013en_US
dc.description.abstractIn order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.en_US
dc.embargo.terms1 yearen_US
dc.identifier.citationDick, Andrew J.. "Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators." <i>Journal of Mechanical Engineering,</i> 59, no. 1 (2013) Journal of Mechanical Engineering: 50-55. http://dx.doi.org/10.5545/sv-jme.2012.673.en_US
dc.identifier.doihttp://dx.doi.org/10.5545/sv-jme.2012.673en_US
dc.identifier.urihttps://hdl.handle.net/1911/70721en_US
dc.language.isoengen_US
dc.publisherJournal of Mechanical Engineeringen_US
dc.rightsArticle is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.en_US
dc.subject.keywordpiezoelectric materialen_US
dc.subject.keywordmicro-beam resonatoren_US
dc.subject.keywordnonlinear oscillationsen_US
dc.titleCharacterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonatorsen_US
dc.typeJournal articleen_US
dc.type.dcmiTexten_US
dc.type.publicationpublisher versionen_US
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