Temperature-dependent optical properties of titanium nitride

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dc.citation.articleNumber101901
dc.citation.issueNumber10en_US
dc.citation.journalTitleApplied Physics Lettersen_US
dc.citation.volumeNumber110en_US
dc.contributor.authorBriggs, Justin A.en_US
dc.contributor.authorNaik, Gururaj V.en_US
dc.contributor.authorZhao, Yangen_US
dc.contributor.authorPetach, Trevor A.en_US
dc.contributor.authorSahasrabuddhe, Kunalen_US
dc.contributor.authorGoldhaber-Gordon, Daviden_US
dc.contributor.authorMelosh, Nicholas A.en_US
dc.contributor.authorDionne, Jennifer A.en_US
dc.date.accessioned2017-03-28T21:32:36Z
dc.date.available2017-03-28T21:32:36Z
dc.date.issued2017en_US
dc.description.abstractThe refractory metal titanium nitride is promising for high-temperature nanophotonic and plasmonic applications, but its optical properties have not been studied at temperatures exceeding 400 °C. Here, we perform in-situ high-temperature ellipsometry to quantify the permittivity of TiN films from room temperature to 1258 °C. We find that the material becomes more absorptive at higher temperatures but maintains its metallic character throughout visible and near infrared frequencies. X-ray diffraction, atomic force microscopy, and mass spectrometry confirm that TiN retains its bulk crystal quality and that thermal cycling increases the surface roughness, reduces the lattice constant, and reduces the carbon and oxygen contaminant concentrations. The changes in the optical properties of the material are highly reproducible upon repeated heating and cooling, and the room-temperature properties are fully recoverable after cooling. Using the measured high-temperature permittivity, we compute the emissivity, surface plasmon polariton propagation length, and two localized surface plasmon resonance figures of merit as functions of temperature. Our results indicate that titanium nitride is a viable plasmonic material throughout the full temperature range explored.en_US
dc.identifier.citationBriggs, Justin A., Naik, Gururaj V., Zhao, Yang, et al.. "Temperature-dependent optical properties of titanium nitride." <i>Applied Physics Letters,</i> 110, no. 10 (2017) AIP Publishing LLC: http://dx.doi.org/10.1063/1.4977840.
dc.identifier.doihttp://dx.doi.org/10.1063/1.4977840en_US
dc.identifier.urihttps://hdl.handle.net/1911/94041
dc.language.isoengen_US
dc.publisherAIP Publishing LLC
dc.rightsArticle is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
dc.titleTemperature-dependent optical properties of titanium nitrideen_US
dc.typeJournal articleen_US
dc.type.dcmiTexten_US
dc.type.publicationpublisher versionen_US
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