Fabrication of waveguide directional couplers using 2-photon lithography

Date
2023
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Optica Publishing Group
Abstract

Advances in 2-photon lithography have enabled in-lab production of sub-micron resolution and millimeter scale 3D optical components. The potential complex geometries are well suited to rapid prototyping and production of waveguide structures, interconnects, and waveguide directional couplers, furthering future development and miniaturization of waveguide-based imaging technologies. System alignment is inherent to the 2-photon process, obviating the need for manual assembly and allowing precise micron scale waveguide geometries not possible in traditional fused fiber coupler fabrication. Here we present the use of 2-photon lithography for direct printing of multi-mode waveguide couplers with air cladding and single mode waveguide couplers with uncured liquid photoresin cladding. Experimental results show reproducible coupling which can be modified by selected design parameters.

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Flynn, C., Cao, H., Applegate, B. E., & Tkaczyk, T. S. (2023). Fabrication of waveguide directional couplers using 2-photon lithography. Optics Express, 31(16), 26323–26334. https://doi.org/10.1364/OE.495363

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Published under the terms of the Optica Open Access Publishing Agreement
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