Automated Evaluation of Critical Features in VLSI Layouts Based on Photolithographic Simulations

Abstract

This paper describes a CAD tool (An Integrated CAD Framework) which links VLSI layout editors to lithographic simulators and provides information on the simulated resolution of a feature to the circuit designer. The designer can modify the original layout based upon this analysis to create compact circuits with better yield capabilities. The objective of this project is to improve the manufacturability of high density VLSI integrated circuits.

Description
Advisor
Degree
Type
Conference paper
Keywords
CAD framework, Circuit design, VLSI layout editors, Integrated circuits
Citation

J. R. Cavallaro, C. Sengupta, F. K. Tittel and W. L. J. Wilson, "Automated Evaluation of Critical Features in VLSI Layouts Based on Photolithographic Simulations," 1996.

Has part(s)
Forms part of
Rights
Link to license
Citable link to this page