Study of degradation in tunneling oxide thin films in EEPROM and FLASH EEPROM test stuctures

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dc.contributor.advisorWilson, William L., Jr.en_US
dc.creatorChen, Chunen_US
dc.date.accessioned2009-06-04T08:30:21Zen_US
dc.date.available2009-06-04T08:30:21Zen_US
dc.date.issued1997en_US
dc.description.abstractDegradation of the tunneling oxide film in EEPROM and FLASH memory test structures has been studied. Two models have been used to characterize the tunneling induced degradation of the oxide thin film. They are the effective tunneling area model and the effective oxide field model. These two models correspond to the two extreme cases of oxide charge trapping. Our study not only suggested an accelerated reliability test method for the tunneling oxide film, but also provided a description of the oxide charge trapping process during Fowler-Nordheim tunneling. The generation mechanism of the oxide trapped charge is discussed.en_US
dc.format.extent105 p.en_US
dc.format.mimetypeapplication/pdfen_US
dc.identifier.callnoTHESIS E.E. 1997 CHENen_US
dc.identifier.citationChen, Chun. "Study of degradation in tunneling oxide thin films in EEPROM and FLASH EEPROM test stuctures." (1997) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/17068">https://hdl.handle.net/1911/17068</a>.en_US
dc.identifier.urihttps://hdl.handle.net/1911/17068en_US
dc.language.isoengen_US
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.subjectElectronicsen_US
dc.subjectElectrical engineeringen_US
dc.subjectCondensed matter physicsen_US
dc.subjectEngineeringen_US
dc.subjectMaterials scienceen_US
dc.titleStudy of degradation in tunneling oxide thin films in EEPROM and FLASH EEPROM test stucturesen_US
dc.typeThesisen_US
dc.type.materialTexten_US
thesis.degree.departmentElectrical Engineeringen_US
thesis.degree.disciplineEngineeringen_US
thesis.degree.grantorRice Universityen_US
thesis.degree.levelMastersen_US
thesis.degree.nameMaster of Scienceen_US
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