Deposition, characterization, and applications of thin film lithium niobate

dc.contributor.advisorRabson, Thomas A.en_US
dc.creatorBaumann, Robert Christopheren_US
dc.date.accessioned2009-06-04T00:10:08Zen_US
dc.date.available2009-06-04T00:10:08Zen_US
dc.date.issued1990en_US
dc.description.abstractFerroelectric thin films of lithium niobate have been epitaxially grown on a variety of silicon and gallium arsenide substrates by reactive r.f. sputtering. The deposition process was optimized by independently varying the substrate temperature, oxygen-argon ratio, target mixture, substrate type, and deposition times. The results of these tests are presented. The lithium niobate thin films were structurally analyzed using Bragg x-ray diffraction (XRD) and scanning electron microscopic (SEM) techniques to determine their orientation, grain size, and domain structure. Electrical characterization included C-V measurements utilized to calculate the permittivity, I-V to obtain the resistivity, and photocurrent measurements to verify the existence of a bulk photovoltaic and pyroelectric effect in the thin films. In addition, preliminary results on prefabricated devices are presented as well as a review of the pertinent effects and potential device applications based on thin films of lithium niobate.en_US
dc.format.extent175 p.en_US
dc.format.mimetypeapplication/pdfen_US
dc.identifier.callnoThesis E.E. 1990 Baumannen_US
dc.identifier.citationBaumann, Robert Christopher. "Deposition, characterization, and applications of thin film lithium niobate." (1990) Diss., Rice University. <a href="https://hdl.handle.net/1911/16318">https://hdl.handle.net/1911/16318</a>.en_US
dc.identifier.urihttps://hdl.handle.net/1911/16318en_US
dc.language.isoengen_US
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.subjectElectronicsen_US
dc.subjectElectrical engineeringen_US
dc.subjectCondensed matter physicsen_US
dc.titleDeposition, characterization, and applications of thin film lithium niobateen_US
dc.typeThesisen_US
dc.type.materialTexten_US
thesis.degree.departmentElectrical Engineeringen_US
thesis.degree.disciplineEngineeringen_US
thesis.degree.grantorRice Universityen_US
thesis.degree.levelDoctoralen_US
thesis.degree.nameDoctor of Philosophyen_US
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