The goal of this work has been the optimization of the XeF(C-A) laser performance and the study of the kinetic processes involved in the formation and removal of the diatomic excimer XeF(C). Significantly improved XeF(C-»A) laser performance has been achieved using e-beam excitation of a multi-component gas mixture that has permitted synthesis of near optimum medium properties for which XeF(C) is produced efficiently while transient absorptions are minimized. This approach has yielded a laser pulse energy density and intrinsic efficiency of 3J/litre and 2%, respectively, values that are comparable to those of B-»X rare gas-halide excimer lasers. Furthermore, simultaneous laser action of XeF(B-»X) at 351 nm and XeF(C~>A) at 475±1nm was realized.