Growth of ferroelectric thin films through metallo-organic decomposition

Simple item page
dc.contributor.advisorCallahan, Daniel L.
dc.creatorBalaraman, Suresh
dc.date.accessioned2009-06-03T23:54:51Z
dc.date.available2009-06-03T23:54:51Z
dc.date.issued1992
dc.description.abstractThe objective of this investigation is to grow films with good electrical and optical properties through the process of metallo-organic decomposition (MOD) and compare them with those made with other processes such as sputtering. Thin lithium niobate and lead zirconium titanate (PZT) films were made. Films were grown on Si(100), Si(111) and sapphire(012). Thin films made via MOD yielded crystalline films with the absence of other phases other than LiNbO$\sb3$. The films were polycrystalline and often randomly oriented. Grain orientation along (104) was observed on Si(100). An attenuation of 2.8 dB/cm was observed on performing optical waveguiding on films grown on sapphire. Capacitance-voltage measurements yielded dielectric constants of about 28-32 for LiNbO$\sb3$ films on Si. The resistivity as measured from current-voltage tests was 10$\sp{12}$ to 10$\sp{13}$. The PZT films were crystalline and no particular grain orientation was found for films grown on silicon. MOD technique was found to yield films with good stoichiometry. (Abstract shortened with permission of author.)
dc.format.extent82 p.en_US
dc.format.mimetypeapplication/pdf
dc.identifier.callnoThesis M.E. 1992 Balaraman
dc.identifier.citationBalaraman, Suresh. "Growth of ferroelectric thin films through metallo-organic decomposition." (1992) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/13651">https://hdl.handle.net/1911/13651</a>.
dc.identifier.urihttps://hdl.handle.net/1911/13651
dc.language.isoeng
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.
dc.subjectEngineering
dc.subjectMaterials science
dc.subjectElectronics
dc.subjectElectrical engineering
dc.titleGrowth of ferroelectric thin films through metallo-organic decomposition
dc.typeThesis
dc.type.materialText
thesis.degree.departmentMechanical Engineering
thesis.degree.disciplineEngineering
thesis.degree.grantorRice University
thesis.degree.levelMasters
thesis.degree.nameMaster of Science
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
1348996.PDF
Size:
2.19 MB
Format:
Adobe Portable Document Format
Download
Collections
Rice University Electronic Theses and Dissertations