Accurate determination of high vacuum pressure

dc.contributor.advisorStebbings, R. F.en_US
dc.creatorStraub, H. Charlesen_US
dc.date.accessioned2009-06-04T00:18:03Zen_US
dc.date.available2009-06-04T00:18:03Zen_US
dc.date.issued1994en_US
dc.description.abstractTwo methods for the accurate determination of high vacuum pressure are reviewed with particular attention paid to the 10$\sp{-6}$ to 10$\sp{-5}$ Torr range. The first method is characterized by calculating the pressure generated from a knowledge of the characteristics and geometry of the vacuum chamber. Static and dynamic expansion techniques are examined. The second method establishes a pressure in the vacuum chamber by balancing an input of gas against a pumping speed and measuring the resulting pressure with a suitable gauge. McLeod, spinning rotor, hot-filament ion, and capacitance diaphragm gauges are discussed. Additionally, new results for ion and capacitance diaphragm gauges are presented including an extension of the range of capacitance diaphragm gauges down to 10$\sp{-6}$ Torr through the use of averaging and a new technique for the direct calibration of capacitance diaphragm gauges between 10$\sp{-6}$ and 10$\sp{-4}$ Torr which uses gravity to deflect the diaphragm and generate apparent pressures.en_US
dc.format.extent120 p.en_US
dc.format.mimetypeapplication/pdfen_US
dc.identifier.callnoTHESIS PHYS. 1994 STRAUBen_US
dc.identifier.citationStraub, H. Charles. "Accurate determination of high vacuum pressure." (1994) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/13904">https://hdl.handle.net/1911/13904</a>.en_US
dc.identifier.urihttps://hdl.handle.net/1911/13904en_US
dc.language.isoengen_US
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.subjectPhysicsen_US
dc.titleAccurate determination of high vacuum pressureen_US
dc.typeThesisen_US
dc.type.materialTexten_US
thesis.degree.departmentPhysicsen_US
thesis.degree.disciplineNatural Sciencesen_US
thesis.degree.grantorRice Universityen_US
thesis.degree.levelMastersen_US
thesis.degree.nameMaster of Scienceen_US
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