Accurate determination of high vacuum pressure

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dc.contributor.advisorStebbings, R. F.
dc.creatorStraub, H. Charles
dc.date.accessioned2009-06-04T00:18:03Z
dc.date.available2009-06-04T00:18:03Z
dc.date.issued1994
dc.description.abstractTwo methods for the accurate determination of high vacuum pressure are reviewed with particular attention paid to the 10$\sp{-6}$ to 10$\sp{-5}$ Torr range. The first method is characterized by calculating the pressure generated from a knowledge of the characteristics and geometry of the vacuum chamber. Static and dynamic expansion techniques are examined. The second method establishes a pressure in the vacuum chamber by balancing an input of gas against a pumping speed and measuring the resulting pressure with a suitable gauge. McLeod, spinning rotor, hot-filament ion, and capacitance diaphragm gauges are discussed. Additionally, new results for ion and capacitance diaphragm gauges are presented including an extension of the range of capacitance diaphragm gauges down to 10$\sp{-6}$ Torr through the use of averaging and a new technique for the direct calibration of capacitance diaphragm gauges between 10$\sp{-6}$ and 10$\sp{-4}$ Torr which uses gravity to deflect the diaphragm and generate apparent pressures.
dc.format.extent120 p.en_US
dc.format.mimetypeapplication/pdf
dc.identifier.callnoTHESIS PHYS. 1994 STRAUB
dc.identifier.citationStraub, H. Charles. "Accurate determination of high vacuum pressure." (1994) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/13904">https://hdl.handle.net/1911/13904</a>.
dc.identifier.urihttps://hdl.handle.net/1911/13904
dc.language.isoeng
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.
dc.subjectPhysics
dc.titleAccurate determination of high vacuum pressure
dc.typeThesis
dc.type.materialText
thesis.degree.departmentPhysics
thesis.degree.disciplineNatural Sciences
thesis.degree.grantorRice University
thesis.degree.levelMasters
thesis.degree.nameMaster of Science
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