Laser-assisted metalorganic chemical vapor deposition of zinc sulfide

dc.contributor.advisorWilson, William L., Jr.en_US
dc.creatorStokes, Scott Wilsonen_US
dc.date.accessioned2009-06-04T06:46:52Zen_US
dc.date.available2009-06-04T06:46:52Zen_US
dc.date.issued1997en_US
dc.description.abstractLaser-assisted metalorganic chemical vapor deposition (MOCVD) was used to grow crystalline zinc sulfide at temperatures as low as 200$\sp\circ$C. The metalorganic sources, dimethylzinc and diethylsulfide, were photodissociated with radiation from a 193 nm ArF excimer laser passing parallel to the substrate. Epitaxial films were grown on gallium arsenide by both the thermal and laser-assisted MOCVD methods. Zinc sulfide films grown on silicon substrates were polycrystalline possibly due to a reaction between sulfur and the silicon substrate creating an amorphous compound at the interface. X-ray diffraction and photoluminescence results indicate that films grown by laser-assisted MOCVD below 500$\sp\circ$C on either substrate were not as high quality as those grown above 500$\sp\circ$C. It is postulated that increased hydrocarbon contamination in the low temperature laser-assisted MOCVD grown films is responsible for the decrease in film quality.en_US
dc.format.extent81 p.en_US
dc.format.mimetypeapplication/pdfen_US
dc.identifier.callnoTHESIS E.E. 1997 STOKESen_US
dc.identifier.citationStokes, Scott Wilson. "Laser-assisted metalorganic chemical vapor deposition of zinc sulfide." (1997) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/17132">https://hdl.handle.net/1911/17132</a>.en_US
dc.identifier.urihttps://hdl.handle.net/1911/17132en_US
dc.language.isoengen_US
dc.rightsCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.en_US
dc.subjectElectronicsen_US
dc.subjectElectrical engineeringen_US
dc.subjectEngineeringen_US
dc.subjectMaterials scienceen_US
dc.titleLaser-assisted metalorganic chemical vapor deposition of zinc sulfideen_US
dc.typeThesisen_US
dc.type.materialTexten_US
thesis.degree.departmentElectrical Engineeringen_US
thesis.degree.disciplineEngineeringen_US
thesis.degree.grantorRice Universityen_US
thesis.degree.levelMastersen_US
thesis.degree.nameMaster of Scienceen_US
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