Wilson, William L., Jr.2009-06-042009-06-041997Stokes, Scott Wilson. "Laser-assisted metalorganic chemical vapor deposition of zinc sulfide." (1997) Master’s Thesis, Rice University. <a href="https://hdl.handle.net/1911/17132">https://hdl.handle.net/1911/17132</a>.https://hdl.handle.net/1911/17132Laser-assisted metalorganic chemical vapor deposition (MOCVD) was used to grow crystalline zinc sulfide at temperatures as low as 200$\sp\circ$C. The metalorganic sources, dimethylzinc and diethylsulfide, were photodissociated with radiation from a 193 nm ArF excimer laser passing parallel to the substrate. Epitaxial films were grown on gallium arsenide by both the thermal and laser-assisted MOCVD methods. Zinc sulfide films grown on silicon substrates were polycrystalline possibly due to a reaction between sulfur and the silicon substrate creating an amorphous compound at the interface. X-ray diffraction and photoluminescence results indicate that films grown by laser-assisted MOCVD below 500$\sp\circ$C on either substrate were not as high quality as those grown above 500$\sp\circ$C. It is postulated that increased hydrocarbon contamination in the low temperature laser-assisted MOCVD grown films is responsible for the decrease in film quality.81 p.application/pdfengCopyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.ElectronicsElectrical engineeringEngineeringMaterials scienceThesisTHESIS E.E. 1997 STOKES